HOLLOW CATHODE OF PLASMA EMITTER OF IONS Russian patent published in 1995 - IPC

FIELD: vacuum equipment. SUBSTANCE: cathode of plasma emitter has side and face walls forming space with emission holes limited by side walls. Lateral dimension of space from face wall to opposite open surface of emission hole in its central part is chosen smaller than corresponding dimension of space close to two opposite side walls. Cathode space can be formed by several insulated cathode elements. Such make of hollow cathode it possible to increase uniformity of distribution of density of ion current. EFFECT: increased uniformity of distribution of density of ion current. 2 cl, 3 dwg