FAST NEUTRAL MOLECULE SOURCE Russian patent published in 1997 - IPC

FIELD: plasma-vacuum engineering. SUBSTANCE: fast neutral molecule source has gas-discharge chamber with discharge feeding source, recharge chamber, accelerating grid placed between gas-discharge chamber and recharge chamber, as well as accelerating voltage source and working gas feeder. Gas-discharge chamber accommodates gas-discharge electrodes, such as anode and cathode. Positive pole of accelerating voltage source is connected to one of electrodes, for example, anode, and negative pole, to recharge chamber. Accelerating grid is connected to negative pole of accelerating voltage source. Grid width is greater than recharge length L in effective range of gas pressures found from formula L=I/nG, where n is density of gas molecules in recharge chamber and G is recharge sectional area. EFFECT: improved design. 10 cl, 4 dwg