SOURCE OF FAST NEUTRAL ATOMS Russian patent published in 2009 - IPC H01J27/04 

FIELD: physics.

SUBSTANCE: invention relates to vacuum and plasma engineering. The source of fast neutral atoms has a working vacuum chamber, an emission grid, a limited emission grid connected to an electrically cold hollow cathode, the lateral surface of which is perpendicular the emission grid, an anode, discharge power supply, the positive terminal of which is connected to the anode and the negative terminal to the hollow cathode, and a bias voltage source, the positive terminal of which is connected to the working vacuum chamber, and the negative terminal of which is connected to the hollow cathode. The source also includes a solenoid, which is fitted with possibility of encircling the hollow cathode with possibility of generating a magnetic field inside the hollow cathode near its lateral surface perpendicular the emission grid. The cross dimension of the emission grid is more than twice larger than the width of the lateral surface of the hollow cathode.

EFFECT: non-uniformity of distribution of beam current does not exceed ±10%, and the ratio of beam current to the discharge current increases by up to 20 to 30%.

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