FIELD: diamond and chemical-mechanical polishing. SUBSTANCE: polishing wheel uses a finishing disk with a rotation drive and polishing compound with filtering properties secured on its location surface; the finishing disk location surface has radial slots in which detachable strips are installed from the external side of the finishing disk, the strips are provided with a means for fixing the strip in the slot and a means for sealing the external part of the slot duct. EFFECT: facilitated procedure. 2 dwg
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Authors
Dates
1995-05-27—Published
1991-06-13—Filed