DEVICE FOR FINISHING SEMICONDUCTOR PLATES Russian patent published in 1996 - IPC

FIELD: semiconductor engineering. SUBSTANCE: device has finishing disk with rotation drive mounted in device case, satellites for sticking plates, facility for locating satellites on finishing disk, hold-down disk for loading plates mounted coaxially to mentioned facility whose axis is offset relative to that of finishing disk. Facility for locating satellites on finishing disk is, essentially, assembly of central and external gear wheels, group of satellites gear wheels with hole to receive satellite in each of them arranged on planet manner between central and external gear wheels and placed in mesh with them; central gear wheel is coaxial to hold-down disk. External gear wheel beyond zone of movement of satellite gears is provided with separable rigid links affording joint with hold-down disk or device case. EFFECT: improved finishing precision. 2 cl, 3 dwg