FIELD: optical masks using integrating boards. SUBSTANCE: linear motor has two motor blocks free to move relative to each other along motor center line; first block has coil base mounting set of coils; second block has magnet base mounting at least one pair of magnets which are spaced apart, as viewed along motor center line, to form air gap and designed for interaction with set of coils through air gap. Set of coils of first block incorporates three coils mounted in tandem along motor center line: two peripheral coils and one in the middle. Middle coil length equals at least distance between pair of magnets in second block and placed opposite to gap between magnets with motor blocks in relatively neutral position. EFFECT: improved design. 3 cl, 11 dwg
