FIELD: semiconductors. SUBSTANCE: vapors of SiCl4 or SiHCl3 are introduced in the oxydric torch flame, the formed particles of SiO2 are precipitated on the base of coarsely porous quartz, and sintering is performed at a temperature of 900 to 1300 C. The total time of thermal treatment in the precipitation and sintering stages is 5 to 100 minutes. EFFECT: facilitated procedure. 2 tbl
Title | Year | Author | Number |
---|---|---|---|
METHOD OF PRODUCING POLYCRYSTALLINE ZINC SELENIDE | 1992 |
|
RU2046843C1 |
METHOD OF PREPARING MONOISOTOPIC SILICON Si | 1999 |
|
RU2155158C1 |
METHOD OF PRODUCTION OF HIGH-PURITY TRICHLOROSILANE AND DEVICE FOR REALIZATION OF THIS METHOD | 1998 |
|
RU2142909C1 |
METHOD OF DETERMINATION OF GAS-FORMING IMPURITIES IN SOLID HIGHLY PURE SUBSTANCES | 1995 |
|
RU2089884C1 |
METHOD OF TRICHLOROSILANE SYNTHESIS | 1993 |
|
RU2038297C1 |
METHOD OF REMOVING DISSOLVED ORGANICS FROM WATER | 1996 |
|
RU2117517C1 |
METHOD OF GERMANIUM HYDRIDE PRODUCING | 1992 |
|
RU2071993C1 |
METHOD OF TUNGSTEN HEXAFLUORIDE PURIFICATION | 2007 |
|
RU2342323C1 |
METHOD OF PRODUCING ESPECIALLY PURE SELENIUM | 2019 |
|
RU2706611C1 |
METHOD OF SYNTHESIS OF DIALKYLMONOTELLURIDES | 1992 |
|
RU2041209C1 |
Authors
Dates
1995-07-09—Published
1988-06-21—Filed