METHOD OF TRICHLOROSILANE SYNTHESIS Russian patent published in 1995 - IPC

Abstract RU 2038297 C1

FIELD: chemical technology. SUBSTANCE: trichlorosilane is synthesized by interaction of silicon tetrachloride with technical silicon and hydrogen chloride at 380-450 C following by separation of chlorosilanes mixture on the diffusion diaphragms. Synthesized trichlorosilane contains SiCl₄6·10^-2 vol. metal impurities are less 1·10^-6 wt.-% Method is used for synthesis trichlorosilane of high-quality. EFFECT: improved method of synthesis, enhanced quality of product.

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RU 2 038 297 C1

Authors

Devjatykh G.G.

Prokhorov A.M.

Zueva G.Ja.

Vorotyntsev V.M.

Dates

1995-06-27—Published

1993-04-16—Filed