CAPACITIVE PRESSURE TRANSDUCER Russian patent published in 1995 - IPC

Abstract RU 2044289 C1

FIELD: measurement technology. SUBSTANCE: pressure transducer has membrane with thickened peripheral part and dielectric substrate, onto which electrodes are formed. The electrodes are connected with contact areas which are brought into contact with the first output conductors. Transducer also has plate disposed at a space relation to the second dielectric substrate, onto which like electrodes are formed being connected with corresponding contact areas; the areas are in contact with the second output conductors. The first and the second dielectric substrates are made in form of flexible dielectric films, which covered with foil at one side. Dielectric film of the membrane is placed onto the membrane by its foil-free side, and dielectric film of the plate is mounted on it by foil-covered side. One more plate is made of dielectric material partially at least at the side where the electrodes are disposed. Contact areas of the electrodes are placed onto side surface of the membrane. The plate is attached to the membrane by binder. The plate may be made itself of binder. Profile of the plate at the side of the membrane follows form of the membrane under effect of maximal admitted measured pressure. In this case, ends of the first and the second output conductors are filled with binder at the places of connection of these conductors to contact areas. EFFECT: improved reliability. 2 cl, 2 dwg

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RU 2 044 289 C1

Authors

Belozubov E.M.

Dates

1995-09-20Published

1993-02-02Filed