FIELD: generation of microwave plasma. SUBSTANCE: method involves generation of initiating discharge in gas by means of electromagnetic waves in microwave range, monitoring resulted discharge structure, detection of continuously repeated discharge part. Then in area of plasma generation initiator is placed. Geometric characteristics and shape of initiator are almost equal to those of continuously repeated discharge part. Initiator is oriented along vector of electromagnetic waves according to orientation of continuously repeated part of discharge. Then plasma is generated by electromagnetic wave in microwave range. Initiators are produced from spiral and half-wave dipole when radiation has linear polarization and from spiral and circle when polarization is circular. EFFECT: increased functional capabilities. 16 cl, 2 tbl, 17 dwg
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