PIEZOELECTRIC DRIVE Russian patent published in 1995 - IPC

Abstract RU 2050037 C1

FIELD: instruments (microscopes). SUBSTANCE: drive has upper supports, which are located in vertexes of triangle and are coupled with upper plate of stage in order to press it against single lower support, which is mounted on end of piezoelectric ceramic transducer of electric signals to bending. When transducer bends, stage is moved. Lower support is located in center of mass of triangle shaped by three upper supports. EFFECT: increased precision. 2 cl, 1 dwg

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RU 2 050 037 C1

Authors

Godzhaev Makhir Omar Ogly

Nejman-Zade Iskander Kjamil' Ogly

Dates

1995-12-10—Published

1990-12-26—Filed