OBJECT MICRODISPLACEMENT DEVICE Russian patent published in 2005 - IPC

Abstract RU 2247467 C1

FIELD: scanning probe microscopes and nanotechnology units.

SUBSTANCE: proposed device has base that mounts piezotube with electrodes. Other end of tube carries support whereto stage is tightly attached by means of spring; object to be is placed on this stage. First magnet is built into stage. Second magnet joined to base by means of holder is disposed inside piezotube in parallel with first magnet and faces the latter by opposing pole. Printed-circuit board inserted in magnet-to-magnet gap is connected to first magnet. Board carries on each side group of parallel tracks. Tracks of different groups are relatively perpendicular and their ends in each group are interconnected and connected to control device.

EFFECT: provision for electrodynamic action on stage; enhanced precision of object positioning.

1 cl, 2 dwg

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RU 2 247 467 C1

Authors

Guljaev P.V.

Dates

2005-02-27Published

2004-04-06Filed