METHOD FOR REGISTERING SAMPLE SURFACE RELIEF BY SCANNING TUNNEL MICROSCOPES AND DEVICE FOR ITS REALIZATION Russian patent published in 1994 - IPC

Abstract RU 2020405 C1

FIELD: measurement instruments. SUBSTANCE: surface is scanned by needle beginning from distance larger than distance required for bringing about tunnel effect. Gradually, after each frame needle is drawn closer to surface tunnel current is measured in points of scanning. Upon attainment of preset value of tunnel current in separate points, further approaching is carried out in other points. Information of relief is recorded in computer memory. EFFECT: higher accuracy of method and simplified design of microscope and improved precision. 4 cl, 2 dwg

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RU 2 020 405 C1

Authors

Sulejmanov Тakhir Samed Ogly

Godzhaev Мakhir Оmar-Ogly

Dates

1994-09-30—Published

1991-06-18—Filed