PIEZOELECTRIC MANIPULATOR FOR TUNNEL MICROSCOPE Russian patent published in 1996 - IPC

FIELD: precision mechanics; displacement of objects. SUBSTANCE: piezoelectric manipulator with magnetic locking of supports has four electromagnets joined in pairs, piezoids arranged above them, stage, and supports. Stage supports are rigidly fixed with base and placed inside electromagnet winding. Piezoids are secured between adjacent supports. Base, supports, and stage are made of ferromagnetic material with residual flux density. Support may be built integral with base and provided with hole receiving spherical-surface contact lead-in supply voltage to stage. The latter may be made in the form of three plates fixed together, upper one being insulated from two remaining plates arranged in parallel in horizontal plane, insulated from each other, and mounted on respective pairs of supports. EFFECT: improved design. 3 cl, 6 dwg