FIELD: microelectronics; production of integrated circuits. SUBSTANCE: method for metallization of polymer film includes chemical pickling of film in heated dichromate sulfuric acid mixture, application of metal by vacuum deposition with subsequent treatment with ultraviolet radiation with radiant flux surface density of 1,51 ≅ J < 6,04 V/cm2. EFFECT: higher strength of coating due to improved adhesion of metal to polymer film.
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Authors
Dates
1995-12-20—Published
1992-12-28—Filed