METHOD FOR MANUFACTURING PHOTO SENSITIVE CONDUCTING LAYERS FOR VISUALIZATION OF RADIATION Russian patent published in 1995 - IPC

FIELD: semiconductor technology. SUBSTANCE: method involves double step vacuum coating of blend having Cadmium selenide. The first step involves coating in quasi-closed volume of blend during 1,5-2 hours. The second step involves coating blend by magnetron under substrate temperature 60-80 C during 45-75 minutes. Content of blend for the first step has 70-80 percents of Cadmium selenide, 12- 26 percents of Cadmium telluride, 4-8 percents of Cadmium chloride. Content of blend for the second step has 95-97 percents of Cadmium sulfide, 3-5 percents of sulfate of copper. Method provides possibility to manufacture photo sensitive conducting layers having factor of resistance variation ≈2·10⁸ and break-down voltage 2·10⁵ В/cm.. EFFECT: increased duration life of visualization unit. 2 tbl