PLASMA METHOD OF PRODUCING FILMS Russian patent published in 1995 - IPC

Abstract RU 2039846 C1

FIELD: acoustics. SUBSTANCE: method involves cathode spraying in oxygen medium in DC field in electrode spacing at temperature of maximum spraying of metal target, with target being exposed to magnetostatic field with intensity vector oriented at right angles to electric field vector; modulating DC field by varying voltage applied to electrodes by 15-20% maintaining magnetic field within the range of 0.05-0.07 T, pressure of oxygen supplied within the range of 5·10-2-10-1 Pa. Oxygen is supplied in the direction perpendicular to sprayed particle flow uniformly from several directions. EFFECT: increased efficiency. 4 cl, 1 dwg

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RU 2 039 846 C1

Authors

Kolosov V.V.

Najanov V.I.

Dates

1995-07-20Published

1992-07-21Filed