APPARATUS FOR VACUUM DEPOSITION OF POLYMER FILM Russian patent published in 1995 - IPC

Abstract RU 2051200 C1

FIELD: vacuum deposition of layers. SUBSTANCE: apparatus has vacuumizer with substrate and evaporator positioned within vacuumizer. Evaporator provided with heater is divided into two chambers positioned in axial alignment one with respect to the other and to evaporator. Substance to be evaporated is charged into one chamber. Other chamber is made cylindrical and disposed in central part of evaporator. Evaporator bottom has vapor discharge opening with supersonic nozzle. Cover is positioned on upper part of evaporator. EFFECT: improved homogeneity and uniformity of applied layer and efficient usage of mass of substance subjected to evaporation. 2 cl, 3 dwg

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RU 2 051 200 C1

Authors

Belov Vladimir Grigor'Evich

Ivanov Vladimir Anatol'Evich

Ivanov Valerij Anatol'Evich

Nagoev Temorlan Khusejnovich

Dates

1995-12-27Published

1991-10-01Filed