FIELD: electronics. SUBSTANCE: gear is attached to technological plant which has window for cassette loading. There is formed window in vertical base, hermetically sealed cover is located on one side of it and container with cassette with semiconductor plates is placed on its other side. Container is mounted on platform and is equipped with locks anchoring it on vertical base and making it possible to free wall of container adjacent to window in vertical base. Spherical joint is attached to sealed cover. Cover is provided with magnetic latches. Rotational module is positioned beneath platform. EFFECT: enhanced operational efficiency. 3 dwg
Authors
Dates
1995-05-20—Published
1992-07-01—Filed