DEVICE FOR ANALYZING SURFACE OF CONDUCTING SPECIMENS Russian patent published in 1997 - IPC

FIELD: instrumentation engineering; analyzing and process installations for checking profile of specimen surfaces and acting on their local points. SUBSTANCE: device has piezomanipulator fixed on cylindrical holder and provided with metering needle; its top part is attached through flexible member to fixed support and bottom part is rigidly coupled with skids mounted on surface being analyzed to form with the latter sliding pair; specimen is mounted on displacement unit in the form of disk fitted onto shaft; device also has facility for moving specimen to metering needle. Working surfaces of sliding pair have roughness R_r≅ 0,05μcm and length l ≅ 0,1r_c, where r_c is maximum linear dimension of contact area between skids and specimen surface; r_c is smallest of curvature radii of specimen surface. EFFECT: provision for device serviceability under four conditions, that is enlarged functional capabilities which makes it possible to conduct measurements and to analyze surfaces of moving specimens of all dimensions over entire surface. 3 cl, 2 dwg