PROCESS OF FORMATION OF MICROCONDUCTORS OF HIGH CONDUCTANCE Russian patent published in 1995 - IPC

FIELD: manufacture of elements of integrated circuits. SUBSTANCE: constant voltage is fed between surface of substrate with epoxy resin and needle electrode dipped into it. Process includes movement of electrode towards substrate till tunnel current emerges. Voltage is raised with immobile electrode till short-circuit current appears. Electrode is drawn from substrate with certain speed. Resin is polymerized at room temperature and constant current present between needle electrode and surface of substrate. Material of substrate is selected under condition that voltage of its plastic deformation is less than value depending on dielectric properties of used polymer and temperature. EFFECT: facilitated manufacture of microconductors.