PROCESS OF DEPOSITION OF METAL COAT Russian patent published in 1996 - IPC

Abstract RU 2067130 C1

FIELD: electronics. SUBSTANCE: process of deposition of metal coat includes spraying of film of pure metal not less than 1.0 10^-8 thick having high electric and heat conduction on to substrate heated in advance. Aluminium or copper with medium size of grins not less than 3.0 10^-8 with content of impurities not higher than 10^-8 and density ensuring encounter of atoms of sprayed metal with atoms of inert gas, for instance, helium under pressure 2-10 Pa, is used process of deposition. EFFECT: improved efficiency of process. 12 cl

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RU 2 067 130 C1

Authors

Larin Marksen Petrovich

Rakhovskij Vadim Izrailovich

Dates

1996-09-27—Published

1995-05-05—Filed