METHOD FOR DETERMINING TYPE OF CONDUCTIVITY OF SEMICONDUCTOR SPECIMENS Russian patent published in 1996 - IPC

Abstract RU 2069416 C1

FIELD: checking electrophysical parameters of semiconductor specimens. SUBSTANCE: for determining type of conductivity of heterogeneous structures by polarity of thermal emf in probe contact region, entire volume of structure is heated while probe is held at room temperature. Type of conductivity is determined while thermal emf is increasing. EFFECT: facilitated procedure.

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RU 2 069 416 C1

Authors

Gusev Evgenij Mikhajlovich[Ru]

Rudovol Tamara Vsevolodovna[Ru]

Shopen Vladimir Ivanovich[Uz]

Dates

1996-11-20Published

1992-06-03Filed