FIELD: checking electrophysical parameters of semiconductor specimens. SUBSTANCE: for determining type of conductivity of heterogeneous structures by polarity of thermal emf in probe contact region, entire volume of structure is heated while probe is held at room temperature. Type of conductivity is determined while thermal emf is increasing. EFFECT: facilitated procedure.
Title | Year | Author | Number |
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Authors
Dates
1996-11-20—Published
1992-06-03—Filed