METHOD OF INSPECTION OF HOMOGENEITY OF SEMICONDUCTOR MATERIALS Russian patent published in 1995 - IPC

Abstract RU 2032962 C1

FIELD: testing of parameters of semiconductor materials. SUBSTANCE: inhomogeneity is judged by value Δρ/Δρno

= Δρ/ρ_o-Δρ/ρfo

consisting magnetic resistance, where Δρ/ρ_o is value of lateral magnetic resistance; Δρ/ρfo

is value of physical component of magnetic resistance which is measured on series of samples with fixed Hall angle and temperature. EFFECT: improved authenticity of inspection.

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RU 2 032 962 C1

Authors

Daunov M.I.

Magomedov A.B.

Dates

1995-04-10—Published

1987-10-29—Filed