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2 035 131

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(51)

IPC

(21) (22)

Application

4795005/21, 1990-02-22

(22)

Actual filing date

1990-02-22

(45)

Published

1995-05-10

(72)

Inventor

Barinov Konstantin IvanovichVasil'Ev Gennadij FedorovichVlasov Vladimir Evgen'Evich

(73)

Holder

Barinov Konstantin IvanovichVasil'Ev Gennadij FedorovichVlasov Vladimir Evgen'Evich

PROBE HEAD Russian patent published in 1995 - IPC

Abstract RU 2035131 C1

FIELD: measurement technology. SUBSTANCE: probe head includes base manufactured from monocrystalline semiconductor with through holes in the form of truncated pyramids. Base is made of at least two plates. Truncated pyramids are matched with bigger bases and spaces are filled with current conducting fluid. EFFECT: increased operational stability. 2 cl, 3 dwg

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RU 2 035 131 C1

Authors

Barinov Konstantin Ivanovich

Vasil'Ev Gennadij Fedorovich

Vlasov Vladimir Evgen'Evich

Dates

1995-05-10—Published

1990-02-22—Filed