EVAPORATION CRUCIBLE Russian patent published in 1999 - IPC

FIELD: semiconductor technology. SUBSTANCE: invention can be used in molecular-ray epitaxy to diminish density of defects in epitaxial structures. Evaporation crucible includes space for evaporated substance and separating member anchored in its neck. Separating member is manufactured in the form of insert with helical conduit. Usage of invention provides opportunity to decrease probability of getting residual vapors of vacuum space into crucible of molecular source without considerable reduction of conductance of crucible and to diminish density of defects in epitaxial structures. Use of invention makes it feasible to decrease density of defects in cadmium telluride film from magnitude 2•10³ cm^-2 to magnitude less than 1•10² cm^-2. EFFECT: decreased density of defects in cadmium telluride film. 2 dwg