DEVICE FOR INPUTTING MOTION IN CHAMBER Russian patent published in 1994 - IPC

FIELD: microelectronics. SUBSTANCE: core is rigidly coupled with shaft mounted in bearings of the sleeve to bottom of which heater is secured provided with heating element and vacuum electrical lead-ins. The end face of the shaft is provided with object attachment members. The sleeve is rigidly coupled with upper carriage of the table ensuring swinging of the object in two mutually-perpendicular directions along the sphere the center of which is in the center of the substrate surface. EFFECT: enlarged operating capabilities. 1 cl, 2 dwg