ELLIPSOMETRIC TRANSMITTER Russian patent published in 2000 - IPC

FIELD: examination of chemical and physical properties of surface, measurement of physical constants and parameters of materials. SUBSTANCE: ellipsometric transmitter includes radiation source, polarizer, compensator, examined object. Radiation incident on polarizer is split into two beams by front of light wave. Beams reflected by or passed through examined object are recorded by two photodetectors. Two analyzers are placed in front of photodetectors. Polarization planes of analyzers are turned through 90 degrees one relative another. EFFECT: diminished optical length of transmitter, possibility of usage of film polarizers and high sensitivity of measurement. 3 dwg