FIELD: microelectronics; manufacture of micromechanical devices, crystal resonators, and the like.
SUBSTANCE: proposed method for producing embossed surface on dielectric and piezoelectric substrates incorporating silicon dioxide in their composition includes application of shielding mask in the form of multilayer thin-film system of two materials onto its surface and formation of shielding mask configuration, substrate etching, and removal of shielding mask; used as shielding mask is multilayer thin-film system of yttrium- yttrium oxide obtained by evaporation in vacuum, yttrium layer thickness being minimum 1 μm and yttrium oxide thickness, minimum 0.05 μm. Intermediate layer of mixture of these materials can be formed between yttrium layer and yttrium-oxide layer.
EFFECT: enhanced yield due to eliminating voids and interruptions in shielding layer, reduced cost of end product.
2 cl
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF PRODUCING RELIEF IN DIELECTRIC SUBSTRATE | 2018 |
|
RU2687299C1 |
| PROCESS OF RELIEF FABRICATION IN DIELECTRIC SUBSTRATE | 1992 |
|
RU2054747C1 |
| METHOD OF OBTAINING RELIEF IN DIELECTRIC SUBSTRATE | 2018 |
|
RU2672034C1 |
| METHOD FOR MAKING RELIEF PATTERNS IN DIELECTRIC SUBSTRATES | 1994 |
|
RU2079865C1 |
| METHOD OF MAKING HIGHLY SENSITIVE "MAGNETORESISTIVE GRADIOMETER HEAD" SENSOR | 2012 |
|
RU2506666C1 |
| MANUFACTURING PROCESS FOR THIN-FILM ELECTROLUMINESCENCE DISPLAY | 1993 |
|
RU2076379C1 |
| METHOD FOR MANUFACTURING OF MICROCIRCUIT BOARDS WITH MULTI-LEVEL THIN-FILM COMMUTATION | 2009 |
|
RU2398369C1 |
| METHOD TO MANUFACTURE QUARTZ CRYSTALLINE ELEMENTS OF Z-SECTION | 2012 |
|
RU2475950C1 |
| METHOD OF MAKING THIN-FILM MULTILEVEL BOARDS FOR MULTICHIP MODULES, HYBRID INTEGRATED CIRCUITS AND CHIP ASSEMBLIES | 2011 |
|
RU2459314C1 |
| METHOD OF PRODUCTION OF DOUBLE-SIDED PRINTED BOARD | 2013 |
|
RU2543518C1 |
