FIELD: microelectronics. SUBSTANCE: device has two sources of modulated light, optical communication elements, photodetector, focusing element, stage, detector of photo electromotive force with capacitance electrode and preliminary amplifier, two power amplifiers, two-channel generator, two recording units. In addition device may have two synchronous detectors, differential amplifier, source of non-modulated light for illumination of tested objects. In addition device has additional light sources and electronic units. Lasers or light-emitting diodes may be used as light sources. EFFECT: increased functional capabilities. 7 cl, 4 dwg
