MONOLITHIC SENSOR OF CHEMICAL COMPOSITION OF SUBSTANCE Russian patent published in 2020 - IPC G01N21/64 H01L31/173 

FIELD: photonics.

SUBSTANCE: invention relates to photonics, specifically to means of measuring chemical composition of substances and / or characteristics of absorption / reflection spectra using optical methods. Monolithic sensor of chemical composition of substance contains at least one first semiconductor structure with p-n-junction and at least one second semiconductor structure with p-n-junction spatially spaced on substrate, sensitive area for arrangement of analyzed substance and electric contacts formed respectively on p-layer and on n-layer of first and second semiconductor structures, wherein the first semiconductor structure is in form of an optical radiation source, and the second semiconductor structure is made in the form of a photodetector. Novelty in the disclosed technical solution is that the substrate is transparent for optical radiation of the optical radiation source, sensitive area for placement of the analyzed substance is made on the back surface of the substrate, and the first and the second semiconductor structures are optically connected.

EFFECT: invention provides formation of a monolithic sensor for chemical composition of a substance having an expanded field of application.

7 cl, 6 dwg