FIELD: microelectronics. SUBSTANCE: device has dielectric layer which face and back sides have crossing strip electrodes. In addition face side of dielectric layer has local electrodes which do not contact strip electrodes in this plane and are located over strip electrodes on opposite side of dielectric layer. EFFECT: increased reliability against shock and vibration, simplified design. 2 dwg
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Authors
Dates
1997-07-10—Published
1995-02-09—Filed