FIELD: instruments, laser interference measurements. SUBSTANCE: method may be used for fast contactless measurement of three-dimensional position of object edges, and detection of deviation of edge from rectilinear shape. Method involves double acoustic-optical modulation of light beam. Primary acoustic-optical modulation using traveling reference acoustic pulse provides possibility to generate three-dimensional interference patterns as measuring band, one of which illuminates border of monitored object. Secondary acoustic-optical modulation, which is produced by traveling scanning acoustic pulse, provides possibility of recording, scanning of light beam, which passes edge of monitored object. Produced electric signal corresponds to three- dimensional position of object border and provides possibility to measure local shift of object border within measuring band. EFFECT: increased range and increased speed of measurements. 4 dwg
Title | Year | Author | Number |
---|---|---|---|
METHOD DETERMINING SPATIAL PARAMETERS OF BOUNDARY OF OBJECT | 2000 |
|
RU2172470C1 |
METHOD FOR MONITORING ARTICLE BORDER POSITION AND DEVICE WHICH IMPLEMENTS SAID METHOD | 1999 |
|
RU2157963C1 |
METHOD OF DETERMINATION OF DEVIATION FROM LINEARITY | 2000 |
|
RU2175753C1 |
APPARATUS FOR DETERMINING DIMENSIONS OF PARTS | 1999 |
|
RU2158416C1 |
PROCESS MEASURING GEOMETRICAL PARAMETERS OF ELEMENTS OF SURFACES | 1999 |
|
RU2158414C1 |
INTERFERENCE METHOD FOR MEASURING PHASE SHIFT OF LIGHT WAVES | 1991 |
|
RU2023982C1 |
ACOUSTOOPTIC FACILITY MEASURING SHIFTS | 2002 |
|
RU2213935C1 |
ACOUSTIC-AND-OPTICAL METHOD DETERMINATION OF DISTANCE TO OBJECT | 1991 |
|
RU2020409C1 |
METHOD FOR MEASURING INTERFERENCE ORDER AND DEVICE IMPLEMENTING SAID METHOD | 1991 |
|
RU2017061C1 |
METHOD OF CONTROLLING PHASE SHIFT IN INTERFERENCE SYSTEMS | 2016 |
|
RU2640963C1 |
Authors
Dates
2000-10-20—Published
1999-08-03—Filed