METHOD FOR DETERMINING CONCENTRATION OF MOBILE CHARGE CARRIERS IN SEMICONDUCTORS Russian patent published in 1997 - IPC

Abstract RU 2094906 C1

FIELD: semiconductor metal science; determining electrophysical properties of semiconductor materials. SUBSTANCE: for determining concentration of mobile carriers in semiconductor, specimen is evacuated, exoelectronic emission of current is determined as function of temperature during slow heating of specimen and its surface treatment with ultraviolet rays. Specimen is then slowly cooled down. Exoelectronic emission as function of temperature is determined again under same conditions and additional surface treatment with infra-red rays at known density of light flux. Two dependences are compared. Temperature at which exoelectronic emission currents coincide is determined and included, together with light flux density, in unknown parameter calculations. EFFECT: facilitated procedure. 3 dwg

Similar patents RU2094906C1

Title Year Author Number
DEVICE WHICH MEASURES PHOTO ELECTROMOTIVE FORCE OF SEMICONDUCTORS 1994
  • Dekhtjar Jurij Davidovich[Lv]
  • Noskov Vladimir Aleksandrovich[Lv]
  • Shnirman Marija Borisovna[Ru]
RU2094905C1
DEVICE FOR DETECTING END OF DRY ETCHING PROCESS 1994
  • Dekhtjar Jurij Davidovich[Lv]
  • Kunitsin Anatolij Viktorovich[Lv]
  • Markelova Galina Nikolaevna[Ua]
  • Noskov Vladimir Aleksandrovich[Lv]
  • Sagalovich Gennadij L'Vovich[Lv]
  • Shnirman Marija Borisovna[Ru]
RU2091905C1
STRUCTURAL FLAW VISUALIZING DEVICE 1994
  • Apels Andris Janovich[Lv]
  • Dekhtjar Jurij Davidovich[Lv]
  • Markelova Galina Nikolaevna[Ua]
  • Sagalovich Gennadij L'Vovich[Lv]
  • Ulmin'Sh Andris Ivarovich[Lv]
  • Shnirman Marija Borisovna[Ru]
RU2094907C1
METHOD OF DETERMINATION OF SEMICONDUCTOR CRYSTAL QUALITY 0
  • Dekhtyar Yurij Davidovich
  • Sagalovich Gennadij Lvovich
SU1728901A1
METHOD OF DETERMINING IMPURITY CONTENTS IN SILICON 0
  • Dekhtyar Yurij Davidovich
  • Sagalovich Gennadij Lvovich
  • Savvaitova Yuliya Aleksandrovna
  • Kazakova Elena Anatolevna
  • Vinogradov Andrej Yakovlevich
SU1749953A1
METHOD OF DETERMINING COMPLETION OF PROCESS ON ION ETCHING OF FILMS 0
  • Dekhtyar Yurij Davidovich
  • Kvelde Yuris Antonovich
  • Kunitsyn Anatolij Viktorovich
  • Markelova Galina Nikolaevna
  • Noskov Vladimir Aleksandrovich
  • Sagalovich Gennadij Lvovich
SU1806419A3
METHOD FOR CONTACT-FREE DETERMINATION OF LIFE SPAN FOR NON-EQUILIBRIUM CARRIERS IN SEMI-CONDUCTORS 2010
  • Fedortsov Aleksandr Borisovich
  • Ivanov Aleksej Sergeevich
  • Churkin Jurij Valentinovich
  • Manukhov Vasilij Vladimirovich
  • Gonchar Igor' Valer'Evich
RU2450387C1
VERSIONS OF METHOD OF RECORDING AND REPRODUCING INFORMATION 0
  • Dekhtyar Yurij Davidovich
  • Sagalovich Gennadij Lvovich
SU1278974A1
METHOD FOR MEASUREMENT OF LIFE SPAN OF NONEQUILIBRIUM CARRIERS IN SEMI-CONDUCTORS 2011
  • Fedortsov Aleksandr Borisovich
  • Ivanov Aleksej Sergeevich
  • Churkin Jurij Valentinovich
  • Manukhov Vasilij Vladimirovich
  • Anikeichev Aleksandr Vladimirovich
RU2450258C1
METHOD OF DETERMINATION OF PROFILE OF CONCENTRATION OF CURRENT CARRIERS IN SEMICONDUCTOR STRUCTURES WITH USAGE OF SEMICONDUCTOR-ELECTROLYTE CONTACT 1993
  • Kolbasov Gennadij Jakovlevich[Ru]
  • Kolmakova Tamara Pavlovna[Ru]
  • Pil'Don Vladimir Iosifovich[Ru]
  • Taranets Tat'Jana Aleksandrovna[Ua]
RU2054748C1

RU 2 094 906 C1

Authors

Dekhtjar Jurij Davidovich[Lv]

Noskov Vladimir Aleksandrovich[Lv]

Shnirman Marija Borisovna[Ru]

Dates

1997-10-27Published

1994-01-28Filed