FIELD: estimating and visualizing structural defects in semiconductor material science. SUBSTANCE: device has vacuum chamber accommodating heater and specimen stage assembly incorporating power converter connected to recording unit. Device is provided with optical unit that has optical radiation source iris diaphragm, converging lens placed at focal distance from source and specimen stage, light filter, fixed planar mirror. Heater is connected to programmed heating unit. EFFECT: improved design. 3 cl, 3 dwg
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