FIELD: microelectronics. SUBSTANCE: built-in device has built-in part and external part. Built-in part has ultraviolet radiation source, light filter, diaphragm, secondary electronic multiplier, and preamplifier. External part has power supplier for ultraviolet radiation source and for secondary electronic multiplier, and recording unit. Secondary electronic multiplier is mounted at maximum 40 mm from controlled entity at 45 deg. to beam axis of active particles. EFFECT: improved design. 2 cl, 2 dwg
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