FIELD: electronics engineering. SUBSTANCE: method includes depositing titanium nitride layer on ceramic emitter made of titanium hexaboride 5-7 mcm thick, applying zirconium nitride on molybdenum holder channel with thickness 10-20 mcm, and also vacuum annealing of emitter unit with specified heating and cooling rate. EFFECT: increased (two and half times) service life of emitter unit and prevented premature breakdown of holder. 6 cl, 3 dwg , 1 tbl
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