METHOD DESIGNED TO EXAMINE SURFACE OF SEMITRANSPARENT SPECIMEN BY SURFACE ELECTROMAGNETIC WAVE MICROSCOPY Russian patent published in 1997 - IPC

FIELD: quality control. SUBSTANCE: method includes application of semitransparent specimen made of surface- active material on base of solid-state prism with refractive index exceeding that of environment. Method includes also setting-up of surface electromagnetic waves on specimen-environment boundary by collimated monochromatic p-polarized radiation of external source directed to prism base, as well as recording of spatial distribution of reflected radiation intensity by photoreceiving device. Prism base is exposed to action of number of collimated beams of monochromatic radiation with different wave lengths λ_o at angles of incidence equal to respective angles of setting-up of surface electromagnetic waves at given λ_o. Spatial distribution of reflected radiation intensity is recorded in all beams simultaneously for selection of required contrast of specimen image. EFFECT: higher examination results. 1 dwg