FIELD: mechanical engineering; application of coatings under vacuum. SUBSTANCE: vacuum system has evacuated vacuum chambers and fore and high vacuum pumps connected to chambers through vacuum pipeline and connecting members, vacuum pickups, vacuum valves, air leaks, vacuum flanged connectors. Coupling unit is made in form of distributing unit consisting of housing with central space and channels connected with central space. Channels are used for connection, through vacuum pipelines with valves, with chambers and vacuum pumps. EFFECT: increased capacity at evacuation, reduced power losses, simplified design of system. 9 dwg
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Authors
Dates
1997-12-20—Published
1995-07-25—Filed