FIELD: process engineering.
SUBSTANCE: proposed method comprises evacuation of the instrument and heating it, forcing gas therein and sealing of the instrument. First, the chamber is pre-evacuated to 5·10-2 mm Hg and forcing dried nitrogen therein to pressure not over 2 atm. Then, evacuation is terminated to measure vacuum in said chamber. In case degree of vacuum does not change instrument is subjected to oil-free pre-evacuation to 5·10-2 mm Hg. Instrument is heated during evacuation to not over 100°C. Pumps are disconnected, switched off top force inert gas to not over 1.3 atm. Chambers are filled with nitrogen to seal the instrument by cold exhaust tune solder. Then, evacuation is performed by means of turbo molecular pump to 5·10-6 mm Hg. Pumps are disconnected, switched off top force inert gas to not over 1.3 atm. Chambers are filled with nitrogen to not over 1.2 at. Chamber is filled with nitrogen to seal the instrument by cold exhaust tune solder.
EFFECT: lower labour input, higher efficiency, longer life.
1 dwg
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