VACUUM INSTALLATION Russian patent published in 1994 - IPC

FIELD: vacuum engineering. SUBSTANCE: at initial moment of evacuating from chamber 1 disk 10 of gate 2 is in the down position. Preliminary evacuation of chamber 1 is performed using forevacuum pump 6 through by-pass pipe line 5 and chambers 8,9 of gate 2 when valve 19 is open. For evacuating chamber 1 using deep vacuum pump 3 disk 10 moves to the upper position and bears on additional vacuum seal 16 by seat 11 for closing opening 15 provided in baffle 7. Evacuating is performed through chamber 8. Vacuum inlet 13 of lever 14, air valve 12 and seal of input of by-pass pipe line 5 are arranged in chamber 9 of gate 2 and insulated from chamber 1 to be evacuated. EFFECT: enhanced extent of evacuation and decreased time of evacuation. 3 dwg