FIELD: machine building.
SUBSTANCE: invention can be implemented for storage and metreed supply of inert or chemically active gases into vacuum chambers of any instrumentation - analytical or research, for example into vacuum chambers of spectrometers. The system of gas puffing consists of filling main connected with high vacuum and fore-vacuum withdrawing mains and tanks via valves and of heating devices. The tanks are communicated with vacuum vessels.
EFFECT: high purity of puffed gases or mixtures of gases.
3 cl, 2 dwg
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