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2 102 816

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C1

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IPC

(21) (22)

Application

5009056/25, 1991-09-17

(22)

Actual filing date

1991-09-17

(45)

Published

1998-01-20

(72)

Inventor

Gorban' Aleksandr Nikolaevich[Ua]Kravchina Vitalij Viktorovich[Ua]

(73)

Holder

Zaporozhskij Gosudarstvennyj Universitet

SOLID-BODY DOPING METHOD Russian patent published in 1998 - IPC

Abstract RU 2102816 C1

FIELD: electronic engineering. SUBSTANCE: method involves sequential coating of semiconductor plate with masking insulating layers of which at least one layer causes mechanical strain in semiconductor plate; formation of mask by photolithography, dope diffusion, followed by annealing. In shaping mask, additional photolithography is conducted to shape mask sections with two different combinations of masking insulating layers. EFFECT: facilitated procedure. 2 dwg

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RU 2 102 816 C1

Authors

Gorban' Aleksandr Nikolaevich[Ua]

Kravchina Vitalij Viktorovich[Ua]

Dates

1998-01-20—Published

1991-09-17—Filed

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