X-RAY REFLECTOMETER Russian patent published in 1998 - IPC

FIELD: measurement technology, test of density, composition and thickness of thin films and determination of roughness of their surfaces. SUBSTANCE: X-ray reflectometer has source 1 of polychromatic X-ray radiation, means 2 of collimation of X-ray radiation, holder 3 of sample 4 mounted for rotation about own axis, rotary bracket 15 with envisaged capability of rotation about axis coinciding with axis of holder of sample, means measuring angles of turn of holder 3 of sample 4 and rotary bracket 15, monochromator 7 and detector 12 located on rotary bracket. Monochromator is mounted for turn about own axis and there is envisaged capability of change of angle of turn with reference to monochromator 7. Rotary bracket carries second monochromator 8 manufactured for turning about own axis and detector 13 which can change its angle relative to second monochromator 8. Monochromator 8 is placed behind first monochromator 7 in path of X-ray beam. First monochromator 7 is semitransparent at least in one of working sections of spectrum. EFFECT: expanded functional capabilities and accuracy of reflectometer. 2 cl, 3 dwg