X-RAY REFLECTOMETER Russian patent published in 2001 - IPC

FIELD: X-ray equipment testing density, composition and thickness of thin films and surface layers, determining roughness of surface. SUBSTANCE: X-ray reflectometer has source of polychromatic X-ray radiation, collimation aids of X-ray beam, sample holder, rotary bracket, row of monochromators and interrupter. Monochromators and interrupter are put on rotary bracket. Reflectometer also has aids detecting radiation and aids for electron processing of signals which incorporate channel with amplitude discrimination of pulses. Monochromator first in path of analyzed beam is semi-transparent. EFFECT: raised measurement precision. 3 cl, 4 dwg