X-RAY REFLECTOMETER Russian patent published in 2001 - IPC

FIELD: X-ray equipment testing density, composition, thickness of films and determining parameters of crystalline structures. SUBSTANCE: reflectometer has source of polychromatic X-ray radiation, aids to collimate X-ray beam, sample holder, rotary bracket and radiation detectors. Row of monochromators. Second radiation source is positioned in front of sample holder. Semitransparent monochromator is set between radiation sources and sample holder. Reflector enables mentioned-above monochromator to be irradiated from opposite directions at various angles. EFFECT: capability to measure three or more spectral lines, provision for high accuracy and productivity of measurements. 3 cl, 7 dwg