X-RAY REFLECTOMETER Russian patent published in 1999 - IPC

FIELD: check of roughness of optically smooth surfaces, composition and thickness of thin films, determination of thickness and planeness of substrates. SUBSTANCE: reflectometer has X-ray radiation source, two formers of X-ray beams each composed of diffraction element with own axis of turn and collimation aid, sample holder mounted for turn about its own axis and coordinate-sensitive radiation detector. Design of location of diffraction elements, sample holder and collimation aid ensures formation of two fan beams converging at angle of 0.001-0.01 rad in zone of sample holder. EFFECT: enhanced productivity of test, reduced labor input into angular adjustment, expanded application field. 5 cl, 12 dwg