MASS SPECTROMETER FOR GAS ANALYSIS Russian patent published in 1998 - IPC

FIELD: mass spectrometry. SUBSTANCE: mass spectrometer for gas analysis includes analyzer chamber with ion source and detector, cathode located in individual chamber separated from analyzer chamber by diaphragm with hole for passage of electrons into analyzer chamber and evacuation system composed of pump and vacuum connection elements that is connected to gas analyzer chamber and chamber with cathode. Magnetic discharge pump connected to chamber with cathode and through it to analyzer chamber is used in the capacity of pump. Diaphragm may have additional evacuation holes which area is calculated in agreement with definite analytical expressions. EFFECT: increased authenticity of analysis, prolonged service life of mass spectrometer. 1 dwg , 1 tbl