FIELD: power semiconductor equipment. SUBSTANCE: method of control over voltage in open state of thyristors and diodes consists in irradiation of lot of rectifying elements by flow of fast electrons, γ - quanta or protons. Voltage V is determined in advance across each i-th rectifying element with specified is, and τ, and value of radiation dose Φ1i is found from relations U3 - ΔU3 ≤ Uki≤ U3+ΔU3 ;; ; , where Us is voltage of rectifying element with is; Uki - is actual value of V of i-th rectifying element after its irradiation with is; ΔU is permissible value of deviation of Uki from Us; ξ is maximum value of coefficient for thyristors or diodes during irradiation that is determined in other rectifying elements of same type beforehand; K is Boltzmann's constant; T is temperature of rectifying element during measurement of V; W is width of effective base region; L0i and τ0i are diffusion length and life time of minority carriers in effective base region of i-th rectifying element before irradiation; Kτ is maximum value of coefficient of degradation of life time of minority carriers determined in advance in other rectifying elements; D* is ambipolar coefficient of diffusion. Across rectifying elements not satisfying condition (I) voltage V is controlled with is and τ in each i-th rectifying element after irradiation and repeat irradiation is conducted which value of dose per each i-th rectifying element should meet conditions: (I); ; ; ; ; ; . EFFECT: improved reliability of method. 2 tbl
Authors
Dates
1998-09-20—Published
1996-03-13—Filed