METHOD FOR IMPLANTING PARTICLES IN SOLID BODY Russian patent published in 1998 - IPC

Abstract RU 2120680 C1

FIELD: engineering physics; all industries for improving electrical, chemical, and mechanical properties of surfaces. SUBSTANCE: method for implanting heavy atoms into solid body involves acceleration of heavy atoms to energy of 10 keV and their implantation in solid body at flux density not lower than 10¹⁵ particles per sq.cm per s. EFFECT: reduced ion energy to improve method energy characteristics and quality of treated surfaces.

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RU 2 120 680 C1

Authors

Volosov V.I.

Churkin I.N.

Dates

1998-10-20—Published

1996-07-29—Filed